PhotoMetrics, Inc.
15801 Graham St.
Huntington Beach CA 92649
(714) 895-4465
Fax (714) 893-4682

Field Emission
Scanning Electron Microscopy (FESEM)

Principle of Operation

A field-emission cathode in the electron gun of a scanning electronmicroscope provides narrower probing beams at low as well as high electronenergy, resulting in both improved spatial resolution and minimized samplecharging and damage. For applications which demand the highest magnification possible, we also offer In-lens FESEM.

Applications include:

Why Field Emission SEM?

Cross-section of a laser window showing multiple thin layers at 50,000x.(in the original photo)

Laser window with thin layers at 50kX

Cross section of contact on silicon

Cross section of via openings

Cross-section of vias in a PWB

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