PhotoMetrics, Inc.
15801 Graham St.
Huntington Beach CA 92649
(714) 895-4465
Fax (714) 893-4682
Scanning Auger Microanalysis (SAM)
SAM provides elemental and chemical composition for all elements with an atomic number greater than helium. Its sampling depth of 2-3 nm allows films as thin as a few monolayers to be analyzed. Auger also produces images of the distributions of elements along the surface and produces profiles of composition vs. depth from 1 to 2000 nm.
Applications include
- Materials evaluation and identification
- Surface contaminants
- Surface homogeneity
- Diffusion profiles
- Particle sizes
- Catalyst degradation
- Interfaces
- Failure analysis
- Corrosion characterization
- Stain identification
- Lifted lead bond evaluation
- Material delamination analysis
- Metal embrittlement
evaluation
- Quality control screening
- "Good" to "bad" sample comparison
- Material and plating/coating thickness determination
- Surface process modification
Principle of Operation
The sample is scanned with a focused beam of
about 5 kV electrons, causing low energy Auger electrons to be ejected from its
surface. The kinetic energies of these Auger electrons provide an analysis for
the chemical elements present in the top few atomic layers. An auxiliary argon
ion beam may be used to remove near-surface layers by "sputtering" to
expose a fresh surface for analysis, producing a profile showing the dependence
of sample composition on depth. Questions about Auger at PhotoMetrics? Ask David Dahlgren.
Surface Science
Links Theory of
Auger spectroscopy
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