PhotoMetrics, Inc.
15801 Graham St.
Huntington Beach CA 92649
(714) 895-4465
Fax (714) 893-4682

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Scanning Auger Microanalysis (SAM)

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SAM provides elemental and chemical composition for all elements with an atomic number greater than helium. Its sampling depth of 2-3 nm allows films as thin as a few monolayers to be analyzed. Auger also produces images of the distributions of elements along the surface and produces profiles of composition vs. depth from 1 to 2000 nm.

Applications include

• Materials evaluation and identification

• Surface contaminants
• Surface homogeneity
• Diffusion profiles
• Particle sizes
• Catalyst degradation
• Interfaces
  
  
• Failure analysis
• Corrosion characterization
• Stain identification
• Lifted lead bond evaluation
• Material delamination analysis
• Metal embrittlement evaluation
  
  
• Quality control screening
• "Good" to "bad" sample comparison
• Material and plating/coating thickness determination
• Surface process modification

Principle of Operation

The sample is scanned with a focused beam of about 5 kV electrons, causing low energy Auger electrons to be ejected from its surface. The kinetic energies of these Auger electrons provide an analysis for the chemical elements present in the top few atomic layers. An auxiliary argon ion beam may be used to remove near-surface layers by "sputtering" to expose a fresh surface for analysis, producing a profile showing the dependence of sample composition on depth. Questions about Auger at PhotoMetrics? Ask David Dahlgren.

Surface Science and Auger Spectroscopy on Wikipedia, and  
Theory of Auger spectroscopy -from Johns Hopkins University

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